A special master has ordered sanctions against Applied Materials Inc. and attorneys at Boston-based Goodwin Procter for stalling in releasing an e-mail by the company’s chief executive.

Special master Thomas Denver, in the U.S. District Court for the Northern District of California, ordered Applied Materials and Goodwin Procter on Friday to pay Advanced Micro-Fabrication a yet-to-be-finalized monetary award. The sanctions follow Advanced Micro-Fabrication’s repeated demand during discovery for an e-mail written by Applied Material’s Chief Executive Michael Splinter.

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